How Cutouts, Edges, and Openings Affect a Semiconductor Heater Layout

https://smart-heater-journal.currentvale.com/posts/common-mica-heater-problems-and-practical-troubleshooting-tips

In etch equipment, a semiconductor heater must deliver heat in a controlled way. It uses a resistive heating element integrated with an electrically insulating structure. One useful trait is repeatable heat delivery